Mass Wafer Transfer Maschine | WTM-Series

The WTM Mass Wafer Transfer tool is cabable of wafer transfer from plastic to plastic.
With this automatic system it is possible to transfer all wafer of a cassette to the other. The system is equipped with two cassette-stations, mechanical wafer notch/flat-aligner, and a Grippermechanism.
Models available for 100, 125, 150 and 200mm wafers.

Possible Transfer Modes:

  • Storage Cassette -> Process Cassette
  • Process Cassette -> Teflon Cassette
  • High Profile Cassette -> Low Profile Cassette

  • Throughput up to 2000 wph
  • Low cost of ownership
  • Integrated Flat/Notch Aligner
  • Edge gripping
  • No vacuum needed
  • Full SECS/GEM compliance
  • Windows operating system
  • ESD safe
  • RFID Cassette Identification on request

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