Products

Your wafer-handling specialist

We propose a wide range of wafer-reading, sorting and transfer tools.
Our systems are designed for 100, 125 ,150 and 200mm wafer diameters, also Thinwaferhandling systems are available.
All mechanical parts, electronic and software is made inhouse, so we can deliver very customized solutions.

Four-Cassette-Sorter FCS

4 automatic tilting loadports.
Throughput up to 700 wph.
Full SECS/GEM compliance
Low cost of ownership.
Smart design & Reliable

WaferID-Reader WMS

Batch WaferID Reader.
Integrated Flat/Notch Aligne.r
Time to read 25 wafers < 60 sec.
Full SECS/GEM compliance.
Table top system.
ESD-Safe.

Two-Cassette-Sorter TCS

2 loadports with integrated aligner.
Throughput up to 500 wph.
Full SECS/GEM compliance.
Table top system.
Smart design & Reliable

Mass Wafer-Transfer-System WTM

Batch Wafer Transfer.
Integrated Flat/Notch Aligner
Plastic >> Plastic.
Plastic >> Quarz.
High/Low profile cassette compatibility.
Low cost of ownership.
Table top system

Two-Cassette-Sorter CTS

2 automatic tilting loadports.
Throughput up to 700 wph.
Full SECS/GEM compliance
Low cost of ownership.
Smart design & Reliable

Automatic Wafer-Aligner NF200

Standalone system.
Very small footprint.
Precise alignment +/- 1°.
0-360° in 1° steps are available.
Waferinspection Mode.
ESD safe.

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