Mass Wafer ID Read System | WMS-Series

The WMS-Series is designed to read the WaferID's of a Waferlot.
With this system all 25 wafers or individual wafers can be read for wafer tracking. The system is equipped with a wafer notch/flat-aligner, a wafer presence/absence sensor, two linear-axis and waferID Reader. The Mapdata can be sent over the GEM-Interface or via ASCII-File to the host.

On request the WMS is able to read also the front and the backside of a wafer.
Models available for 100, 125, 150 and 200mm wafers.

  • Cycletime to align, scan and read 25 wafers < 80 sec
  • Low cost of ownership
  • Compact footprint 580 x 380 mm
  • Full SECS/GEM compliance
  • Windows operating system
  • TouchPanel PC
  • ESD safe
  • Waferbackside ID-reading possible
  • RFID Cassette Identification on request
  • Other Interfaces on request
  • Reliable

Waferscribes readable by the system

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